講   題:半導體製造業的數據分析(Data Analytics in Semiconductor Manufacturing)

主 講 人:台大工工所 藍俊宏 教授(National Taiwan University Institute of Industrial Engineering)

主 持 人:王志軒 教授

主辦單位:交通大學工業工程與管理系

時   間: 108年 9月 16日(星期一) 13:20 ~ 15:20

地   點:管二館520室

演講摘要:

Advanced Process Control (APC) has become a key element in the semiconductor fabrication process, with aggressive competition for achieving better quality. The motivation for implementing APC is to improve device yield by controlling processes and equipment to collect information, reduce process variability, and increase equipment efficiency. To achieve this, a wide variety of mathematical/statistical and physical techniques have been developed and used, and standards and communication interfaces between the equipment and IT systems have been defined. APC is the current practice to ensure a continuous process improvement in semiconductor manufacturing. The controlling algorithms, system interfaces, and infrastructure have been widely developed and discussed in the literature over the last two/three decades. It can be regarded as a general heading for all kinds of equipment and process engineering systems in semiconductor manufacturing. It normally consists of several functional systems, for example, Run-to-Run (R2R) control, Fault Detection and Classification (FDC), Overall Equipment Efficiency (OEE), and e-Diagnostic. The fundamental aspects of APC are data collection and interface design, which enable the aforementioned engineering systems to function. The exact scope of APC is hard to clearly define because the techniques are being continuously developed and standards are constantly evolving. This talk will cover my researches in the past under the APC framework, to show you some quick ideas for APC data analytics.

演講性質:學術研究專題

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